Machine UPH : 2500 Disks Per Hour (11 Secs Expose Time)
Disk Form-Factors : 65mm, 70mm, 84mm, 95mm
(Conversion Kits)
Cleanliness Class : Class 4(ISO14644:1) Environment
UV Chamber Type : 4 Units of 3 Slots UV Chambers
Other Accessories : OZONE Sensors, N2 Purging Supply, DI Water Cooling Mechanism, UV Protection Window , etc
